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scanning probe microscopy
Scanning probe microscopy (SPM) is a branch of microscopy that forms images of surfaces using a physical probe that scans the specimen. SPM was founded in 1981, with the invention of the scanning tunneling microscope, an instrument for imaging surfaces at the atomic level.
Many scanning probe microscopes can image several interactions simultaneously. The manner of using these interactions to obtain an image is generally called a mode.
The resolution varies somewhat from technique to technique, but some probe techniques reach a rather impressive atomic resolution. This is due largely because piezoelectric actuators can execute motions with a precision and accuracy at the atomic level or better on electronic command. This family of techniques can be called "piezoelectric techniques". The other common denominator is that the data are typically obtained as a two-dimensional grid of data points, visualized in false color as a computer image.
==Established types of scanning probe microscopy==
*AFM, atomic force microscopy
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*Contact AFM
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*Non-contact AFM
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*Dynamic contact AFM
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*Tapping AFM
*BEEM, ballistic electron emission microscopy
*CFM, chemical force microscopy
*C-AFM, conductive atomic force microscopy
*ECSTM electrochemical scanning tunneling microscope
*EFM, electrostatic force microscopy
*FluidFM, Fluidic force microscopy〔(FluidFM - Home - A unique new tool for single cell biology and beyond )〕〔(Single-Cell Analysis & Manipulation | FluidFM | Nanosurf )〕〔(Cytosurge )〕
*FMM, force modulation microscopy
*FOSPM, feature-oriented scanning probe microscopy
*KPFM, kelvin probe force microscopy
*MFM, magnetic force microscopy
*MRFM, magnetic resonance force microscopy
*NSOM, near-field scanning optical microscopy (or SNOM, scanning near-field optical microscopy)
*PFM, Piezoresponse Force Microscopy
*PSTM, photon scanning tunneling microscopy
*PTMS, photothermal microspectroscopy/microscopy
*SCM, scanning capacitance microscopy
*SECM, scanning electrochemical microscopy
*SGM, scanning gate microscopy
*SHPM, scanning Hall probe microscopy
*SICM, scanning ion-conductance microscopy
*SPSM spin polarized scanning tunneling microscopy
*SSM, scanning SQUID microscopy
*SSRM, scanning spreading resistance microscopy
*SThM, scanning thermal microscopy
*STM, scanning tunneling microscopy
*STP, scanning tunneling potentiometry〔(Vorlesungsskript Physikalische Elektronik und Messtechnik ) 〕
*SVM, scanning voltage microscopy
*SXSTM, synchrotron x-ray scanning tunneling microscopy
* SSET Scanning Single-Electron Transistor Microscopy
Of these techniques AFM and STM are the most commonly used for roughness measurements.
抄文引用元・出典: フリー百科事典『 ウィキペディア（Wikipedia）』
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